SEMICONDUCTOR & MICROELECTRONICS
In the semiconductor industry numerous processes need ultra pure water for their operation. Any disturbance in water quality may lead to a cost intensive plant shut down - this should be avoided. Therefore, continuous and fast water analysis is required to meet the high quality standards set.
Ultra pure water is prepared under particularly strin-gent specifications. It is a matter of ensuring purity in respect of all types of contaminants: organic/inorganic compounds, dissolved/solid or volatile/non-volatile components, dissolved gases, reactive/inert substances etc. Depending on the respective application, require-ments regarding UPW purity are defined in norms such as ASTM D5127 and SEMI F63.
Ultra-pure water (UPW) is primarily used in the manufacture of semiconductors and microelectronics. It is used inter alia in the
Regular chemical and/or steam-based cleaning processes (pharma), as well as ultrafiltration (semi-conductors), ozonation and general optimizing of duct systems can minimize impurities. The effectiveness of cleaning processes and the quality of the UPW used are subject to monitoring through TOC analyses and conductivity measurements.
The primary and critical application of UPW is front end cleaning in the manufacture of integrated circuit boards.
Potential sources of impurities may be