SEMICONDUCTOR & MICROELECTRONICS

In the semiconductor and microelectronics industries, the high quality and purity requirements for product and process safety are met by accurate and reliable on-line TOC monitoring in the lowest levels.

Semiconductor & Microelectronics

In the semiconductor industry numerous processes need ultra pure water for their operation. Any disturbance in water quality may lead to a cost intensive plant shut down - this should be avoided. Therefore, continuous and fast water analysis is required to meet the high quality standards set.

Ultra pure water is prepared under particularly strin-gent specifications. It is a matter of ensuring purity in respect of all types of contaminants: organic/inorganic compounds, dissolved/solid or volatile/non-volatile components, dissolved gases, reactive/inert substances etc. Depending on the respective application, require-ments regarding UPW purity are defined in norms such as ASTM D5127 and SEMI F63.

Types of Water

Process water
Ultra pure water (UPW)
Industrial waste water
Discharge control

Process Control and Product Safety

Ultra-pure water (UPW) is primarily used in the manufacture of semiconductors and microelectronics. It is used inter alia in the

rinsing of wafers
the dilution of chemicals
and in optical systems in photolithography

Regular chemical and/or steam-based cleaning processes (pharma), as well as ultrafiltration (semi-conductors), ozonation and general optimizing of duct systems can minimize impurities. The effectiveness of cleaning processes and the quality of the UPW used are subject to monitoring through TOC analyses and conductivity measurements.

The primary and critical application of UPW is front end cleaning in the manufacture of integrated circuit boards.

Potential sources of impurities may be

Feed water and additional water used in the preparation of ultra-pure water are the sources of impurities such as particles, bacteria/biological growth, organics (TOC) and inorganic components.
Distribution systems can in turn be a source of contamination, as can additives and cleaning processes.

TOC Analyzer for Pure Water Applications

LAR's TOC analyzer QuickTOC_purity is the most reliable measurement system for pure and ultra pure water applications. Due to a special injection loop, the sample is fully protected against contaminations from ambient air. Hence, the QuickTOC_purity reliably detects the TOC level of pure water.

The combustion leader in TOC analysis provides maximum reliability and availability, hence also profitability for its operators.

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UV TOC Analyzer

LAR's QuickTOC_uv is a continously working analyzer for the determination of total organic carbon (TOC) and dissolved organic carbon (DOC) in pure, drinking, surface and process water.

The continuous TOC monitoring system. Fast. Reliable. Compact.

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